Premium
Wet‐oxidation effect on p‐type transparent conducting CuAlO 2 thin film
Author(s) -
Kim DaeSung,
Choi SeYoung
Publication year - 2005
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200521337
Subject(s) - transmittance , water vapor , thin film , materials science , electrical resistivity and conductivity , oxygen , band gap , oxygen pressure , analytical chemistry (journal) , chemistry , optoelectronics , nanotechnology , environmental chemistry , organic chemistry , engineering , electrical engineering
The wet‐oxidation effect on optical and electrical properties of CuAlO 2 thin films was investigated with different water vapor pressures. Preferential (006) oriented films were ob‐tained after wet‐oxidation. The transmittance was 50–85% for the visible range and the optical band gap was estimated to be 3.96–4.20 eV. The p‐type nature of the films was confirmed by Hall effect measurements. The resistivity and transmittance were increased as water vapor pressure, and these phenomena were caused by the decrease of lower oxides with higher oxygen pressure. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)