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Improved electrical, optical, and structural properties of undoped ZnO thin films grown by water‐mist‐assisted spray pyrolysis
Author(s) -
Pérez L. Martínez,
AguilarFrutis M.,
ZelayaAngel O.,
Muñoz Aguirre N.
Publication year - 2006
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200521207
Subject(s) - materials science , mist , deposition (geology) , electrical resistivity and conductivity , thin film , spray pyrolysis , chemical engineering , pyrolysis , zinc , analytical chemistry (journal) , nanotechnology , metallurgy , chemistry , organic chemistry , paleontology , physics , sediment , meteorology , electrical engineering , biology , engineering
Undoped ZnO thin films were prepared using the ultrasonic spray pyrolysis deposition technique with zinc acetylacetonate dissolved in N,N‐dimethylformamide as the source materials solution. The addition of water mist in a parallel flux to the spray solution stream was also used during deposition of the films. The addition of water mist improved the electrical characteristics of the ZnO films. Fresh ZnO samples were then thermally annealed in a H 2 reducing atmosphere. X‐ray diffraction patterns show mainly the wurzite crystalline ZnO phase in the films. An electrical resistivity ( ρ ) of around 2.7 × 10 −2 Ω cm was measured at room temperature for the best undoped ZnO film. ρ is approximately one order of magnitude lower than the resistivities found in undoped ZnO films obtained by means of similar non‐vacuum deposition techniques. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)