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Microstructure of (104)‐oriented Bi 3.25 La 0.75 Ti 3 O 12 and Bi 3.54 Nd 0.46 Ti 3 O 12 ferroelectric thin films on multiply twinned SrRuO 3 /Pt(111) electrodes on YSZ(100)‐buffered Si(100)
Author(s) -
Hesse Dietrich,
Lee Sung Kyun,
Gösele Ulrich
Publication year - 2005
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200521176
Subject(s) - materials science , ferroelectricity , microstructure , pulsed laser deposition , coercivity , substrate (aquarium) , thin film , polarization (electrochemistry) , dielectric , nanotechnology , optoelectronics , composite material , condensed matter physics , chemistry , oceanography , physics , geology
Uniformly (111)‐oriented, multiply twinned SrRuO 3 ‐covered platinum electrodes have been grown on YSZ(100) buffer layers on Si(100) substrates by a combination of r.f. sputtering and pulsed laser deposition (PLD). They provide a smooth and plane substrate surface for the growth of multiply twinned, uniformly (104)‐oriented ferroelectric Bi 3.25 La 0.75 Ti 3 O 12 (BLT) and Bi 3.54 Nd 0.46 Ti 3 O 12 (BNT) thin films grown by PLD at an optimum substrate temperature of 750 °C. Microstructure, morphology and crystallographic orientation of the SrRuO 3 /Pt electrodes and the BLT and BNT films are characterized by XRD, AFM, TEM, and SAED. In spite of the multiply twinned structure, the entire ferroelectric film has a uniform component P ⊥ of the polarization vector perpendicular to the film plane. The (104)‐oriented BLT and BNT films on electroded Si(100) are shown to have good ferroelectric properties (remanent polarization, coercive field, fatigue resistance) and are thus suitable for applications in silicon‐based technologies. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)