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In situ observation of the evolution of porous silicon interference filter characteristics
Author(s) -
Volk J.,
Ferencz K.,
Ramsden J. J.,
Tóth A. L.,
Bársony I.
Publication year - 2005
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200461234
Subject(s) - porous silicon , silicon , materials science , interference (communication) , wavelength , in situ , filter (signal processing) , scattering , absorption (acoustics) , porosity , porous medium , layer (electronics) , reflectivity , light scattering , optics , optoelectronics , visible spectrum , nanotechnology , chemistry , composite material , physics , telecommunications , engineering , channel (broadcasting) , electrical engineering , organic chemistry
Abstract Porous silicon multilayer formation was observed by in situ monitoring of the reflectivity spectra in the visible range. In order to reproduce the formation process optical model simulation was carried out. For demonstration of this method a 24‐layer microcavity structure was selected. Although in this low wavelengths region some absorption and scattering effects complicate the overall picture, the combined analysis throws new light upon the evolution of the porous silicon multilayer. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)