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Influence of the experimental procedure in the specific surface measurement by chemical dissolution of n + nanoporous silicon
Author(s) -
Descamps Y.,
DufourGergam E.,
Halimaoui A.
Publication year - 2005
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200461178
Subject(s) - dissolution , silicon , nanoporous , substrate (aquarium) , porous silicon , materials science , porosity , chemical engineering , analytical chemistry (journal) , chemistry , nanotechnology , composite material , chromatography , metallurgy , oceanography , geology , engineering
In this paper, we used the chemical dissolution of porous silicon (PS) to determine the specific surface area of PS obtained from n + substrate. Two initial porosity values (62 and 39% with 1 µm and 0.5 µm thickness respectively) and two dissolution etchants were used. It is shown that the dissolution experimental procedure influences the extracted specific surface value. Under good dissolution conditions, we calculed 90 m 2 /cm 3 and 130 m 2 /cm 3 surface area value respectively. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)