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Effect of porous silicon formation on stiction in surface micromachined MEMS structures
Author(s) -
Bhattacharya Enakshi,
Rani Helen Anitha,
Venu Babu U.,
Rao P. R. S.,
Bhat K. N.,
Martin J.
Publication year - 2005
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200461149
Subject(s) - stiction , surface micromachining , microelectromechanical systems , materials science , surface roughness , bulk micromachining , surface finish , silicon , composite material , adhesion , surface (topology) , cantilever , optoelectronics , nanotechnology , fabrication , medicine , alternative medicine , geometry , mathematics , pathology
Stiction, or adhesion of components to one another, is a major failure mechanism in surface micromachined MEMS. In this paper we discuss roughening of the surface of polysilicon, which forms the structural layer in surface micromachining, by the formation of porous silicon and its effect on stiction. The adhesivity of the surface is investigated by measurements of contact angle and the roughness is measured by a surface profiler. Measurements to estimate stiction on surface micromachined cantilevers and accelerometers are reported. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)