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Wedge‐shaped layers from porous silicon: the basics of laterally graded interference filters
Author(s) -
Bohn H. G.,
Marso M.
Publication year - 2005
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200461126
Subject(s) - perpendicular , interference (communication) , wedge (geometry) , porous silicon , materials science , constant (computer programming) , ohmic contact , porosity , current (fluid) , electric field , equivalent circuit , optics , acoustics , composite material , geometry , physics , computer science , electrical engineering , engineering , mathematics , voltage , layer (electronics) , channel (broadcasting) , quantum mechanics , programming language
The process of making laterally graded interference filters has been reanalyzed. A simple and consistent picture arises if one applies a constant electric field perpendicular to the etch current instead of a constant current. The system is quantitatively modeled by means of a pure ohmic equivalent circuit model. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)