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Defect states in Czochalski p‐type silicon: the role of oxygen and dislocations
Author(s) -
Castaldini A.,
Cavalcoli D.,
Cavallini A.,
Pizzini S.
Publication year - 2005
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200460510
Subject(s) - silicon , materials science , oxygen , precipitation , float (project management) , photoluminescence , condensed matter physics , deformation (meteorology) , crystallography , mineralogy , metallurgy , chemistry , optoelectronics , composite material , physics , meteorology , engineering , organic chemistry , marine engineering
This contribution reports the study, by junction spectroscopies, of electronic states induced by thermal and deformation treatments in p‐type Si. In order to understand the role that oxygen precipitation, metallic contamination and plastic deformation play on the defect states, several sets of Cz (Czochalski) and Fz (Float‐zone) Si samples and different material treatments were investigated. The electronic states were also compared with optical transitions obtained by photoluminescence analyses carried out on the same sample sets. These defect states could thus be microscopically identified with specific defect types. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)