Premium
Fabrication and microstructures of Si composite nanocone arrays
Author(s) -
Meng X. M.,
Shang N. G.,
Lee C. S.,
Bello I.,
Lee S. T.
Publication year - 2005
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200420086
Subject(s) - high resolution transmission electron microscopy , materials science , scanning electron microscope , transmission electron microscopy , microstructure , composite number , silicon , layer (electronics) , fabrication , sputtering , nanotechnology , optoelectronics , composite material , thin film , medicine , alternative medicine , pathology
Multi‐layer Si composite cones with nano‐scale diameter were fabricated by a simple ion sputtering method, and characterized with scanning electron microscopy (SEM), high‐resolution transmission electron microscopy (HRTEM), and electron energy loss spectroscopy. SEM observation showed that the as‐fabricated nanocone arrays on silicon substrates had a high density of 10 10 –10 11 cm 2 , diameters of less than 70 nm, and heights of about 200 nm. Cross‐section HRTEM characterization revealed that the nanocones were composed of one‐, two‐ or three‐layer structures. The layer in these cones were identified to be pure Si, FeSi or 3C–SiC, and to have obvious orientation relationships. The formation mechanisms of the nanocones were discussed. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)