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Development of an Automatic System for Measuring Particle Charge and Size distributions in a clean room
Author(s) -
Adachi Motoaki,
Liu Benjamin Y. H.,
Pui David Y. H.
Publication year - 1991
Publication title -
particle and particle systems characterization
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.877
H-Index - 56
eISSN - 1521-4117
pISSN - 0934-0866
DOI - 10.1002/ppsc.19910080137
Subject(s) - aerosol , charge (physics) , condenser (optics) , particle counter , computational physics , particle (ecology) , particle size , charge density , electric charge , particle size distribution , dispersity , materials science , analytical chemistry (journal) , physics , optics , chemistry , meteorology , chromatography , light source , oceanography , quantum mechanics , polymer chemistry , geology
An automatic measuring system was developed to perform simultaneous measurements of particle size and charge distributions in a clean room and other aerosol sources. The system consists of an electrostatic condenser (EC) and an optical particle counter (OPC), which are controlled by a personal computer (PC). The PC automatically varies the voltage on the EC and converts the corresponding OPC counts to charge distributions. The reliabilities of the data inversion method and the automatic measuring system were confirmed by theoretical and experimental examinations, respectively. In the theoretical examination, inverted charge distributions were tested and compared with various assumed input distributions. In the experiment where monodisperse aerosols neutralized by a 85 Kr neutralizer were used, the measurement results agreed well with the theoretical Boltzmann charge distribution. The application of this technique is demonstrated by the measurement of charge and size distributions of aerosols in a clean room.