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Atmospheric‐pressure plasma‐enhanced chemical vapor deposition of nanocomposite thin films from ethyl lactate and silica nanoparticles
Author(s) -
Milaniak Natalia,
Laroche Gaétan,
Massines Françoise
Publication year - 2021
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.202000153
Subject(s) - fourier transform infrared spectroscopy , dielectric barrier discharge , nanocomposite , materials science , plasma enhanced chemical vapor deposition , analytical chemistry (journal) , nanoparticle , surface modification , plasma polymerization , scanning electron microscope , atmospheric pressure plasma , atmospheric pressure , chemical vapor deposition , dielectric , chemical engineering , polymerization , nanotechnology , plasma , chemistry , polymer , composite material , organic chemistry , optoelectronics , physics , oceanography , quantum mechanics , geology , engineering
Abstract Nanocomposite coatings are made by atmospheric‐pressure plasma‐enhanced chemical vapor deposition from ethyl lactate (EL) and silica nanoparticles (NPs) in a dielectric barrier discharge (DBD) using frequency‐shift keying (FSK) to alternate between 1‐ and 15‐kHz voltages. In situ plasma Fourier‐transform infrared spectroscopy (FTIR) and thin film FTIR, scanning electron microscopy, atomic force microscopy, and profilometry show that (i) 1 kHz DBD mainly deposits NPs, 15 kHz only polymerizes EL; (ii) the EL polymerization rate is the same in FSK and continuous modes; (iii) despite the 50/50 contribution of both frequencies, the NP deposit is three times faster in FSK mode than in 1 kHz DBD and compared with 1 and 15 kHz coatings, in the nanocomposite, NP Si–O–Si and EL C═O bonds per unit length are equal to 68% and 34%, respectively. In situ FTIR detects SiO 2 NPs, their functionalization, and the formation of CO 2 .