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Study of the synthesis of C:H coating by PECVD for protecting Mg‐based nano‐objects
Author(s) -
Liang Hui,
Panepinto Adriano,
Prince Loic,
Olivier Marjorie,
Cossement Damien,
Bousser Etienne,
Geng Xi,
Li Wenjiang,
Chen Minfang,
Snyders Rony,
Thiry Damien
Publication year - 2020
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.202000083
Subject(s) - nanoindentation , materials science , plasma enhanced chemical vapor deposition , coating , context (archaeology) , layer (electronics) , nanowire , chemical vapor deposition , nano , scanning electron microscope , chemical engineering , plasma , composite material , nanotechnology , paleontology , physics , quantum mechanics , engineering , biology
In the context of protecting Mg‐based nano‐objects for potential hydrogen storage applications, the potential of C:H layer as a barrier polymer material deposited by the plasma‐enhanced chemical vapor deposition process is examined. Corrosion tests reveal (a) good barrier properties of the C:H layer and (b) suggest an increase in the internal stress with the power dissipated in the plasma. The latter is attributed to an increase in the cross‐linking density of the coatings accompanied by an increase in the stiffness as shown by nanoindentation measurements. Finally, for a given set of plasma parameters, Mg‐based nanowires were successfully enrobed by the C:H coatings as evidenced by scanning electron microscopy measurements.