Premium
Special issue: Plasmas for microfabrication
Author(s) -
Hamaguchi Satoshi,
Agarwal Sumit,
Zajickova Lenka,
Wertheimer Michael R.
Publication year - 2019
Publication title -
plasma processes and polymers
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201990001
Subject(s) - microprocessor , electronics , plot (graphics) , moore's law , electrical engineering , integrated circuit , engineering , mathematics , statistics