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Large‐area atmospheric pressure dielectric barrier discharges in Ar–HMDSO mixtures: Experiments and fluid modelling
Author(s) -
Loffhagen Detlef,
Becker Markus M.,
Hegemann Dirk,
Nisol Bernard,
Watson Sean,
Wertheimer Michael R.,
Klages ClausPeter
Publication year - 2020
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201900169
Subject(s) - hexamethyldisiloxane , dielectric barrier discharge , dielectric , atmospheric pressure , plasma , materials science , electrode , mechanics , argon , atmospheric pressure plasma , plasma cleaning , voltage , plane (geometry) , electric discharge , analytical chemistry (journal) , chemistry , optoelectronics , electrical engineering , physics , organic chemistry , quantum mechanics , chromatography , engineering , geometry , mathematics , meteorology
The electrical discharge characteristics of a large‐area experimental dielectric barrier discharge in argon–hexamethyldisiloxane mixtures containing up to about 1,600 ppm of the monomer is analysed by means of electrical measurements and numerical modelling. A time‐dependent, spatially one‐dimensional fluid model is employed, taking into account the spatial variation of the discharge plasma between the two plane‐parallel dielectrics covering the electrodes. Reasonable agreement between electrical measurements and modelling results is generally found for the gap voltages and discharge currents. Remaining differences between the measured and calculated electrical energy dissipated in the plasma per period are discussed.