Premium
Plasma techniques in the production of customized MEMS‐applications
Author(s) -
Bittner Achim,
Hochstein David,
Rockstroh Jan,
Dehnert Jan,
Hedrich Frank,
Billat Sophie,
Dehé Alfons
Publication year - 2019
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201900047
Subject(s) - microelectromechanical systems , gyroscope , cleanroom , ranging , engineering , microfluidics , computer science , systems engineering , nanotechnology , manufacturing engineering , materials science , aerospace engineering , telecommunications
Micro electromechanical systems (MEMS) have found their way into many kinds of applications. Especially sensors are daily used by each of us in products like cars and smartphones. The focus of Hahn‐Schickard is the development and the production of highly specialized MEMS products, ones that especially enable small companies the access to MEMS technology. The portfolio includes specific inertial sensors like gyroscopes for navigation and safety, acceleration sensors for crash‐test dummies, microfluidic devices for biological, and medical applications, and so on. All of these devices are manufactured in the institute's cleanroom in volumes ranging from single devices up to hundreds of thousands of chips. In this article, the multitude of application scenarios will be demonstrated by way of diverse MEMS components.