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Nanoparticle production from HMDSO in atmospheric pressure argon‐oxygen plasma
Author(s) -
Wallimann Roger,
Roth Christian,
Rudolf von Rohr Philipp
Publication year - 2018
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201700202
Subject(s) - argon , nanoparticle , oxygen , nucleation , electrostatic precipitator , materials science , dielectric barrier discharge , yield (engineering) , chemical engineering , analytical chemistry (journal) , particle (ecology) , particle size , atmospheric pressure plasma , plasma , chemistry , nanotechnology , dielectric , chromatography , composite material , organic chemistry , physics , oceanography , optoelectronics , quantum mechanics , geology , engineering
A dielectric barrier discharge containing argon and oxygen is used to dissociate HMDSO with the purpose of producing silica‐like particles. Solid material is deposited in an electrostatic precipitator and analyzed with SEM, FTIR, and weight measurements. The variation of oxygen concentration shows an optimum for particle yield at an oxygen‐to‐monomer ratio of 20. Increasing yield and nanoparticle formation are also found with increasing excitation frequency and explained with the corresponding higher power input and nanoparticle survival rates from aerosol theory. Nanoparticles only form when residence time allows decomposition, nucleation, and growth.