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DBD‐based plasma polymerization from monomer‐argon mixtures: Analytical model of monomer reactions with excited argon species
Author(s) -
Klages ClausPeter,
Czerny Andreas K.,
Philipp Jens,
Becker Markus M.,
Loffhagen Detlef
Publication year - 2017
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201700081
Subject(s) - argon , hexamethyldisiloxane , plasma polymerization , monomer , metastability , excited state , plasma , polymerization , chemistry , analytical chemistry (journal) , materials science , atomic physics , polymer , organic chemistry , physics , quantum mechanics
Experimental studies of DBD‐based atmospheric‐pressure plasma polymerization from mixtures of hexamethyldisiloxane (HMDSO) with argon are presented and interpreted using an analytical model of the plasma‐chemical kinetics. Gradient films are obtained using a special DBD‐PACVD reactor. Growth‐rate profiles and their monomer fraction dependence show that long‐living excited Ar species play a major role in the deposition mechanism. Reactions of HMDSO with metastable and resonance argon atoms as well as argon excimers are considered within the presented model which may be simplified by introducing a lumped excited argon species Ar*. Model predictions are compared with experimental results. Recombination reactions must be included in order to reproduce characteristic features of the measured growth‐rate curves.