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Determination of internal temperatures within nitric oxide inductively coupled plasmas
Author(s) -
Blechle Joshua M.,
Hanna Angela R.,
Fisher Ellen R.
Publication year - 2017
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201700041
Subject(s) - radical , excited state , plasma , chemistry , spectroscopy , analytical chemistry (journal) , absorption (acoustics) , inductively coupled plasma , oxide , atomic physics , materials science , physics , organic chemistry , quantum mechanics , composite material
Determination of molecular temperatures within inductively coupled plasmas is critical to understanding the reactions that drive the chemistry of these systems and the mechanisms involved in surface processing. To investigate such interactions, a dual, in situ broadband absorption and optical emission spectroscopy system was designed; providing insight into neutral and excited state species energetics, specifically rotational ( T R ) and vibrational ( T V ) temperatures across a broad spectral range (>800 nm). Nitric oxide plasmas have been investigated, where measured T V values were higher than T R values, indicating rotational degrees of freedom are more easily thermalized. Using the imaging of radicals interacting with surfaces technique, surface scatter coefficients were measured for NO radicals, which are discussed in relation to energy partitioning in these systems.