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A Comparison of Continuum and Kinetic Simulations of Moderate pd Microplasmas Integrated With High Secondary Yield Cathodes
Author(s) -
Verma Abhishek Kumar,
Alamatsaz Arghavan,
Venkattraman Ayyaswamy
Publication year - 2017
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201600130
Subject(s) - particle in cell , electron , atomic physics , plasma , monte carlo method , argon , computational physics , kinetic energy , secondary electrons , ion , secondary emission , cathode , direct simulation monte carlo , materials science , context (archaeology) , physics , electric field , electron temperature , supersonic speed , mechanics , chemistry , classical mechanics , dynamic monte carlo method , nuclear physics , paleontology , statistics , mathematics , quantum mechanics , biology
The computational techniques commonly used for low‐temperature plasma simulations are compared in the context of modeling microplasmas driven by cathodes with high secondary electron emission coefficient. Simulations of 100 µm argon microplasmas operating at pressures of 100 Torr and secondary electron emission coefficient of 0.1 are performed using particle‐in‐cell with Monte Carlo collisions (PIC‐MCC), and fluid model using the full‐momentum equations for both electrons and ions. Results obtained for plasma density, potential, electric field, and electron temperature using continuum simulations are compared with the PIC‐MCC simulations as benchmark. The comparison demonstrates significant discrepancies and a need to calibrate continuum simulation parameters based on kinetic simulations.