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Fabrication and Field Emission Properties of Diamond‐Like Carbon Nanostructure Arrays Deposited by Filtered Cathodic Vacuum Arc
Author(s) -
Li Yunhui,
Yan Xueqing,
Yang Jin,
Zhang Gengmin
Publication year - 2016
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201600023
Subject(s) - materials science , field electron emission , vacuum arc , diamond like carbon , nanotechnology , etching (microfabrication) , nanostructure , anode , microelectronics , fabrication , carbon fibers , diamond , ultra high vacuum , cathode , optoelectronics , electrode , composite material , thin film , electron , layer (electronics) , chemistry , medicine , physics , alternative medicine , quantum mechanics , pathology , composite number
Diamond‐like carbon (DLC) films are deposited by filtered cathodic vacuum arc (FCVA) at room temperature. Well‐aligned DLC nanofiber arrays are structured using porous anodic aluminum oxide (AAO) templates. Along with a slow process of template etching, the DLC nanofibers gradually bend over and closely weave into a mask, preventing the AAO from entirely dissolving into the etching solution. This resist‐mask of DLC/AAO nanostructure is removed by the effect of electric charge accumulation at a high electric field and then the DLC nano‐whisker array is formed. The electron field emission (EFE) properties of DLC nanoarrays indicate a low turn‐on field of 1.60 V µm −1 and a threshold field of 2.98 V µm −1 . These DLC nanowhisker arrays signify a high potential for assembling carbon‐based vacuum microelectronic devices.