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Observation of Bi‐Maxwellian Distributions in a H 2 Plasma Produced by a Narrow Gap VHF Discharge
Author(s) -
Chen KuanChen,
Chiu KuoFeng,
Chen ChiaFu,
Lien ChengYang,
Tsai YuJer,
Lien TingKuei,
Matsunaga Fumihiko,
Tanaka Masaaki,
Ogiwara Kohei,
Uchino Kiichiro,
Kawai Yoshinobu
Publication year - 2016
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201500183
Subject(s) - plasma , langmuir probe , atomic physics , electrode , plasma diagnostics , electron , materials science , chemistry , physics , nuclear physics
A capacitively coupled VHF H 2 plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi‐Maxwellian electron distribution was observed near the discharge electrode while a Maxwellian one near the center of the inter‐electrode gap. The simulation using the PIC code showed that electrons had the Druyvesteyn‐like distribution near the discharge electrode.