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Scalable Production of Silicon Nanocone Solar Cells in Integrated Plasma Photovoltaic Nanofabrication Cluster
Author(s) -
Huang Shiyong,
Lim Jian Wei Mark,
Chan Chia Sern,
Xu Shuyan,
Wei Deyuan,
Guo Yingnan,
Xu Luxiang,
Ostrikov Kostya Ken
Publication year - 2016
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201500086
Subject(s) - photovoltaic system , plasma , materials science , nanolithography , nanotechnology , scalability , cluster (spacecraft) , silicon , optoelectronics , monocrystalline silicon , engineering , computer science , physics , fabrication , electrical engineering , medicine , alternative medicine , pathology , quantum mechanics , database , programming language
An Integrated Plasma Photovoltaic Nanofabrication Cluster was used to produce nanocone silicon PV cells. Inductively coupled plasma discharges removed damage on Si wafers and textured arrays of nanocones, while simultaneously forming a p–n junction. A plasma enhanced chemical vapor deposition process passivated surfaces through growth of SiN x :H and a‐Si:H films. Microscopy of surfaces revealed uniform, well defined nanocones. Samples also show reductions in reflectance, while quantum efficiency measurements reveal improved spectral and PV response, with short circuit‐currents of 36 mA/cm 2 , open circuit voltages of 560 mV, fill factors reaching 80%, and conversion efficiencies of up to 14.8%.