Premium
Fabrication of Structurally Simple Index‐Matched ITO Films Using Roll‐to‐Roll Sputtering for Touch Screen Panel Devices
Author(s) -
Kim Cheol Hwan,
Choi Woo Jin,
Cho Seong Keun,
Goshima Daiji,
Ham Dong Seok,
Kim KwangJe,
Jeong Jongkoo,
Lee Jae Heung,
Lee SangJin
Publication year - 2015
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201500057
Subject(s) - materials science , sputtering , indium tin oxide , polyethylene terephthalate , refractive index , fabrication , substrate (aquarium) , optoelectronics , sputter deposition , electrode , thin film , high refractive index polymer , roll to roll processing , wafer , optics , composite material , nanotechnology , chemistry , geology , medicine , oceanography , alternative medicine , physics , pathology
We report the electrical and optical properties of structurally simple refractive‐index‐matched indium tin oxide (IM‐ITO) films prepared on high‐refractive index hard‐coated polyethylene terephthalate (KM‐V2) substrates by using a pilot scale roll to roll magnetron sputtering system for implementation in touch screen panels. We found that the ITO thin films are polycrystalline with a preferred (222) orientation. We determined the appropriate conditions for the deposition of simple‐structure IM‐ITO films on KM‐V2 substrates for touch screen panels with an invisible electrode pattern. Moreover, the outgassing of the polymer substrate is very important in the roll‐to‐roll sputtering fabrication of high‐quality IM‐ITO films with the required electrical and optical properties.