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Film Stress of Amorphous Hydrogenated Carbon on Biaxially Oriented Polyethylene Terephthalate
Author(s) -
Bahre Hendrik,
Behm Henrik,
Grochla Dario,
Böke Marc,
Dahlmann Rainer,
Hopmann Christian,
Ludwig Alfred,
Winter Jörg
Publication year - 2015
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201500045
Subject(s) - materials science , polyethylene terephthalate , composite material , elongation , amorphous silicon , chemical vapor deposition , silicon , amorphous solid , layer (electronics) , stress (linguistics) , substrate (aquarium) , carbon fibers , nanotechnology , metallurgy , crystallography , ultimate tensile strength , crystalline silicon , linguistics , chemistry , philosophy , oceanography , geology , composite number
Amorphous hydrogenated carbon (a‐C:H) deposited on steel with plasma enhanced chemical vapor deposition can be used as elongation tolerant oxygen barrier. However, the elongation tolerance of the a‐C:H film is lost if deposited on a poly(ethylene terephthalate) (PET) for reasons unknown. To assess this phenomenon, a‐C:H was deposited on PET, silicon substrates, and silicon micro‐cantilevers, and the stress was determined by measuring the radius of curvature. a‐C:H deposited on PET showed lower compressive stress than on silicon. This difference is not due to the formation of a gradient layer or plastic deformation of PET. Instead, the most probable explanation is that energetic ions cause a partial release of biaxial orientation within the PET, thereby reducing the compressive stress.