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Chemical and Physical Effects of the Carrier Gas on the Atmospheric Pressure PECVD of Fluorinated Precursors
Author(s) -
Hubert Julie,
Vandencasteele Nicolas,
Mertens Jérémy,
Viville Pascal,
Dufour Thierry,
Barroo Cédric,
Visart de Bocarmé Thierry,
Lazzaroni Roberto,
Reniers François
Publication year - 2015
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201500025
Subject(s) - plasma enhanced chemical vapor deposition , argon , helium , x ray photoelectron spectroscopy , atmospheric pressure , analytical chemistry (journal) , impurity , materials science , oxygen , deposition (geology) , surface roughness , gas phase , chemical engineering , chemical vapor deposition , chemistry , nanotechnology , organic chemistry , composite material , paleontology , oceanography , sediment , engineering , biology , geology
The atmospheric pressure PECVD deposition and texturization of hydrophobic coatings using liquid fluorinated C 6 F 12 and C 6 F 14 precursors are investigated. The effect of the carrier gas (argon and helium) is discussed in terms of the behavior of the gas phase and of the characteristics of the deposited film. Mass spectrometry measurements indicate that the fragmentation is higher with argon while helium reacts very easily with oxygen impurities leading to the formation of C x F y O z compounds. These observations are consistent with the chemical composition of the films determined by XPS and the variation in the deposition rate. Moreover, the streamers present in the argon discharge affect the morphology of the surface by increasing the roughness, which leads to the increase in the hydrophobicity of the coatings.