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Influence of Tetramethyldisiloxane‐Oxygen Mixtures on the Physical Properties of Microwave PECVD Coatings and Subsequent Post‐Plasma Reactions
Author(s) -
Hall Colin J.,
Murphy Peter J.,
Griesser Hans J.
Publication year - 2015
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201400159
Subject(s) - materials science , plasma enhanced chemical vapor deposition , oxygen , modulus , ultimate tensile strength , composite material , polymer , deposition (geology) , plasma activation , elastic modulus , limiting oxygen concentration , plasma , silicon , metallurgy , chemistry , organic chemistry , paleontology , physics , quantum mechanics , sediment , biology
Coatings deposited by microwave plasma enhanced CVD have potential for applications as protective coatings against mechanical and environmental damage. The properties of plasma polymer coatings can, however, vary markedly with deposition conditions, and we report here that this is also the case for coatings deposited from mixtures of tetramethyldisiloxane (TMDSO) and oxygen. Hardness, modulus, stress, mass, and surface chemical compositions all varied considerably with the TMDSO/O 2 ratio. Post‐plasma reactions led to changes in the physical properties of coatings, which were found to be dependent on the oxygen concentration at the time of deposition. Coatings deposited at low oxygen concentration lost mass, became more rigid, became less tensile in stress, and underwent a large increase in hardness and modulus. These coatings were found to craze over periods of up to six months. Coatings deposited at high oxygen concentrations were observed to gain mass, became less rigid, and showed reduced compressive stress. They were more stable but their mechanical mismatch with polymer substrates affects their performance as protective coatings.