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Generation of Uniform Large‐ A rea VHF Plasmas by Launching a Traveling Wave
Author(s) -
Chen HsinLiang,
Tu YenCheng,
Hsieh ChengChang,
Ai ChiFong,
Tsai WenFa,
Leou KehChyang
Publication year - 2014
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201300101
Subject(s) - standing wave , traveling wave , amplitude , electric field , phase (matter) , acoustics , physics , plasma , field (mathematics) , optics , mathematics , mathematical analysis , quantum mechanics , pure mathematics
An innovative technique, i.e., creating a traveling wave by launching two specific standing waves at the same time, is proposed to generate uniform large‐area very high frequency (VHF) plasmas. The viability of this approach has been verified by numerical simulation in this study. The electric field distribution for each standing wave is controlled by the phase difference between the corresponding two feeding points ( φ ) placed on opposite sides of electrode and designated to produce a specific standing wave pattern. The simulated electric filed distributions obtained at various φ are consistent with numerous experimental works. By applying these two standing waves at the same time, a traveling wave can be lanuched as the conditions that these two standing waves must have the same amplitude and be spatially and temporally out of phase by 90° are met.