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Ion‐Beam Induced Surface Roughening of Poly‐(methyl methacrylate) (PMMA) Tuned by a Mixture of Ar and O 2 Ions
Author(s) -
Dai Wei,
Ko TaeJun,
Oh Kyu Hwan,
Lee KwangRyeol,
Moon MyoungWoon
Publication year - 2012
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201200037
Subject(s) - materials science , ion , ion beam , surface roughness , amorphous solid , polymer , methyl methacrylate , poly(methyl methacrylate) , morphology (biology) , layer (electronics) , surface finish , amorphous carbon , chemical engineering , beam (structure) , analytical chemistry (journal) , composite material , crystallography , chemistry , monomer , organic chemistry , optics , physics , biology , engineering , genetics
The evolution of ion‐beam induced surface roughening of PMMA was investigated using an anode‐layer ion beam source with O 2 , Ar, and their mixture. Use of the O 2 ion beam created rough granular patterns on the surface of PMMA because O 2 ions could break the CC backbone and subsequently combine with the broken C bonds, resulting in local cross‐linking and aggregation. However, the Ar ion beam tended to reduce the surface roughness due to the decomposition of the oxygen‐containing ester groups (OCH 3 and OCO) and the increase of an overall cross‐linking of the amorphous carbon layer, which played a role in etch resistance and suppression of polymer mobility as well as aggregation on the modified PMMA surface. By varying the ratio of Ar over O 2 , the surface morphology of PMMA was modified to exhibit features ranging from granular roughness to crater‐like features.