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Cost Effective Deposition System for Nitrogen Incorporated Diamond‐like Carbon Coatings
Author(s) -
Kumar Sushil,
Dwivedi Neeraj,
Kumar Dalai Manas
Publication year - 2012
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201100202
Subject(s) - diamond like carbon , raman spectroscopy , nitrogen , materials science , coating , carbon fibers , deposition (geology) , torr , analytical chemistry (journal) , chemical vapor deposition , diamond , carbon film , thin film , chemical engineering , composite material , nanotechnology , chemistry , optics , organic chemistry , paleontology , physics , engineering , sediment , composite number , biology , thermodynamics
Nitrogen incorporated diamond‐like carbon (N‐DLC) thin films were grown, at high base pressure of 5 × 10 −3 Torr, under varied nitrogen gas pressure (NGP) (variation from 55 to 85 mTorr) and varied negative self‐bias (NSB) (variation from 35 to 190 V), using primary pump (rotary pump) processed radio frequency‐plasma enhanced chemical vapour deposition technique. These films then studied for their structural compositional and nanomechanical properties. Time of flight‐secondary ion mass spectroscopy was used to confirm the presence of nitrogen and to investigate the depth profile of these N‐DLC films, whereas energy dispersive X‐ray analysis measurement was carried to analyze the atomic concentration of constituents of film. Micro‐Raman analysis reveals change in D and G peak positions and I D / I G ratio with the change in NSB as well as NGP. It is worth noting that N‐DLC film grown at NGP and NSB of 55 mTorr and 100 V, respectively, exhibited very high hardness as 40.3 GPa. Hence, due to better nanomechanical properties by simpler, high deposition rate and cost effective process, which yielded very high throughput may leads these N‐DLC films to their wide industrial applications such as hard and protective coating on cutting tools, automobile parts, bio‐implants or wear resistant coating on magnetic hard disk.