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Spectroscopic Characterization of Plasmas Generated by ECR Microwave Discharge of N 2 Gas and Pulsed Laser Ablation of a B 4 C Target
Author(s) -
Feng Hui,
Sun Jian,
Ding Dayu,
Xu Ning,
Ying Zhifeng,
Wu Jiada
Publication year - 2011
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201100115
Subject(s) - plasma , electron cyclotron resonance , laser ablation , emission spectrum , microwave , plasma diagnostics , nitrogen , boron , laser induced breakdown spectroscopy , atomic physics , materials science , plasma parameters , analytical chemistry (journal) , atomic emission spectroscopy , laser , chemistry , spectral line , inductively coupled plasma , optics , physics , organic chemistry , chromatography , quantum mechanics , astronomy
The plasmas generated by co‐action of electron cyclotron resonance (ECR) microwave discharge of N 2 gas and pulsed laser ablation (PLA) of a B 4 C target were spectroscopically characterized using time‐ and space‐resolved optical emission spectroscopy (OES). The plasmas exhibit rapid variations in time and space and the optical emissions of the plasmas show unique characteristics in comparison with the plasmas generated solely by ECR discharge or PLA. At the early stages of the expansion of the PLA boron/carbon plasma in the ECR nitrogen plasma, the plasma emission is dominated by emission lines from atomic and ionic boron and carbon which decrease rapidly during the expansion of the PLA plasma, and then evolves to be dominant in emission bands from nitrogen molecules and nitrogen molecular ions. The emission bands of the C 2 Swan system and the CN violet system were also distinguished. The processes including gas‐phase reactions occurring in the plasmas were discussed based on the characteristics of the plasma emissions.