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Fluorocarbon Coatings Deposited on Micron‐Sized Particles by Atmospheric PECVD
Author(s) -
Abadjieva Elena,
van der Heijden Antoine E. D. M.,
Creyghton Yves L. M.,
van Ommen J. Ruud
Publication year - 2012
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201100044
Subject(s) - plasma enhanced chemical vapor deposition , x ray photoelectron spectroscopy , fluorocarbon , materials science , scanning electron microscope , atmospheric pressure plasma , analytical chemistry (journal) , atmospheric pressure , dielectric barrier discharge , chemical vapor deposition , coating , particle (ecology) , chemical engineering , deposition (geology) , dielectric , composite material , plasma , nanotechnology , chemistry , chromatography , physics , oceanography , optoelectronics , quantum mechanics , geology , engineering , paleontology , sediment , biology
Fluorocarbon coatings have been deposited on micron‐sized silica particles by means of atmospheric pressure plasma‐enhanced chemical vapor deposition (PECVD). The silica particles have a diameter in the range between 40 and 70 µm. They are fluidized at atmospheric pressure in a circulating fluidized bed combined with a dielectric barrier discharge (DBD) reactor. Four coatings have been produced with four different precursors, respectively, octafluorocyclobutane (C 4 F 8 ), hexafluoropropylene (C 3 F 6 ), trifluorethanol (C 2 H 3 OF 3 ) and hexafluoro‐2‐propanol (C 3 H 2 OF 6 ). The Ar filamentary discharges are sustained with a plasma power of 150 W at 25 kHz. The chemical and morphological features of the coatings are investigated by means of scanning electron microscopy (SEM), X‐ray microanalysis, and X‐ray photoelectron spectroscopy (XPS). All coatings have a flake‐like morphology and variable thickness. The F/C ratio, also called “Teflon” parameter, has the following values: 1.37, 1.09, 0.30 and 1.45 for each of the four precursors, respectively. The coating produced with trifluorethanol is highly cross‐linked, but has relatively poor fluorinated surface. The highest surface fluorination is achieved, when octafluorocyclobutane is used as a precursor. The presented results enable the comparison and selection of precursors, so that particle surface functionality may be developed for improved blast performance and sensitivity of advanced energetic materials.