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H 2 : The Critical Juncture between Polymerization and Dissociation of Hydrocarbons in a Low‐temperature Plasma
Author(s) -
Hansen Terje A. R.,
van de Sanden Richard,
Engeln Richard
Publication year - 2011
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201100023
Subject(s) - polymerization , dissociation (chemistry) , hydrocarbon , chemistry , plasma , argon , plasma polymerization , fragmentation (computing) , ion , analytical chemistry (journal) , polymer chemistry , organic chemistry , polymer , physics , quantum mechanics , computer science , operating system
The chemistry in an argon plasma jet, admixed with a small percentage of CH 4 , C 2 H 2 , H 2 and mixtures thereof, is investigated by means of residual gas a4lysis. Polymerization of such hydrocarbon precursors is known to occur when their densities exceed the Ar + ion density. This paper shows that polymerization also occurs for precursor gas flows far below the initial Ar + ion flow emanating from the plasma source. This is entirely due to the negative effect of H 2 on the Ar + ion density. Adding 1–2% of H 2 to the total argon and hydrocarbon gas flow suffices to initiate polymerization. Although, H 2 can be injected directly into the system, fragmentation of the hydrocarbon precursors themselves can likewise supply (part of) the required H 2 . Polymerization is furthermore enhanced when both precursors are used together. The contribution of C 3 H y species to the plasma chemistry will likewise be substantiated.