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Carbon Nanoparticle/Hydrogenated Amorphous Carbon Composite Thin Films Formed in ECR Plasma
Author(s) -
Calafat Maria,
Yuryev Pavel,
Drenik Aleksander,
Slim Aref,
Clergereaux Richard
Publication year - 2011
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201000151
Subject(s) - materials science , amorphous carbon , graphite , electron cyclotron resonance , plasma , thin film , nanoparticle , composite number , carbon fibers , carbon film , amorphous solid , composite material , chemical engineering , analytical chemistry (journal) , nanotechnology , crystallography , chemistry , organic chemistry , physics , quantum mechanics , engineering
Composite thin films are deposited from acetylene in a microwave multipolar plasma excited at distributed electron cyclotron resonance in one single process. The composite consists of carbon‐based nanoparticles embedded in a hydrogenated amorphous matrix. Effects of plasma duration and microwave power on the composite thin film are described along with the powder growth mechanisms. Indeed, two types of nanoparticles are formed: pure graphite‐like and graphite‐like shell with a metallic core. The first type grows from recombinations in the plasma phase, while core‐shelled starts from a metallic core generated from the reactor walls. These metallic clusters can be heated while immersed in the plasma which leads to catalytic growth of powders.