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Deposition of TiN–WS 2 Nanocomposite Coatings by a Hybrid Process: Reactive Sputtering and Clusters Gun
Author(s) -
Mohan D. Bharathi,
Svahn F.,
Cavaleiro A.
Publication year - 2009
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200932309
Subject(s) - tin , materials science , nanocomposite , sputtering , sputter deposition , deposition (geology) , cavity magnetron , composite material , scanning electron microscope , grain size , diffraction , argon , coating , metallurgy , nanotechnology , thin film , optics , chemistry , paleontology , physics , organic chemistry , sediment , biology
A dc magnetron reactive sputtering equipment connected with a homemade clusters gun was used to deposit a series of TiN–WS 2 nanocomposite coatings with different magnetron power values and different argon pressures in the clusters gun. The original idea was to achieve from the TiN matrix, originated from the normal running of the magnetron system, the high wear resistance property, whereas the pre‐formed IF–WS 2 nanospheres introduced by the clusters gun would provide the low friction coefficient. A small peak detected at low diffraction angles by X‐ray diffraction in two of the produced samples gave the first evidence of the WS 2 nanospheres incorporation in the TiN matrix. Then, scanning electron microscopy was used for observing very small grain features which were identified as the WS 2 nanospheres by energy dispersive analysis of X‐rays, demonstrating the feasibility of this hybrid technique for the deposition of nanocomposite coatings.