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Effect of Methane Pressure on the Size of Carbon Nanoparticles Deposited by Pulsed Plasma Enhanced Chemical Vapor Deposition
Author(s) -
Rastkar Ahmad R.,
Shokri Babak,
Kabir Mojtaba,
Amirzadeh Maria,
Rahimipour Mohammad R.
Publication year - 2009
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200932207
Subject(s) - nanocrystalline material , raman spectroscopy , fourier transform infrared spectroscopy , materials science , amorphous carbon , nanoparticle , chemical vapor deposition , analytical chemistry (journal) , amorphous solid , carbon fibers , transmission electron microscopy , methane , plasma enhanced chemical vapor deposition , chemical engineering , carbon film , nanotechnology , thin film , chemistry , crystallography , organic chemistry , composite material , optics , composite number , physics , engineering
The nanoparticles of carbon were deposited from methane under the potential of a pulsed direct current discharge. The deposition was carried without external heating. The size, chemistry, and structure of carbon nanoparticles were characterized using transmission electron microscopy (TEM), X‐ray diffraction (XRD), Raman and Fourier transform infrared (FTIR) spectroscopy. The minimum size of the nanoparticles was as low as 10 nm as shown by TEM. The nanocrystalline or amorphous structure of the particles was revealed by XRD. Raman spectroscopy indicated on the sp 2 bonds of carbon and FTIR spectroscopy identified the other bonds of carbon.