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The Role of Modulated IR Radiometry Measurements in the Characterization of ZrON Thin Films
Author(s) -
Macedo Francisco,
Carvalho Pedro,
Cunha Luís,
Vaz Filipe,
Gibkes Jurgen,
Bein Bruno K.,
Pelzl Josef
Publication year - 2009
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200931802
Subject(s) - thin film , materials science , characterization (materials science) , substrate (aquarium) , thermal , thermal diffusivity , coating , diffusion , radiometry , analytical chemistry (journal) , work (physics) , chemical engineering , composite material , optics , nanotechnology , chemistry , thermodynamics , organic chemistry , oceanography , physics , geology , engineering
This work is devoted to the investigation of relevant thermal transport parameters of multifunctional ZrO x N y thin films, prepared in strict controlled conditions. Composition and structural characterizations revealed the existence of two different types of films, with a structural change from fcc ZrN to Zr 3 N 4 ‐type. Modulated IR radiometry was used to screen out these internal changes, and also to prove its importance and application viability within complicate systems such as thin films. The thermal diffusion time of the coatings and the ratio of the thermal effusivities coating‐to‐substrate were directly determined. Empirical correlations between processing conditions, the films' composition and structure, and thermal transport properties were found.