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Characteristics of Optical Emission Spectra Induced by Laser Beams and Crystallization of PBZNZT Thin Films
Author(s) -
Cheng HsiuFung,
Chen YuWen,
Palathinkal Thomas Joseph,
Lin INan
Publication year - 2009
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200930108
Subject(s) - analytical chemistry (journal) , crystallinity , materials science , thin film , substrate (aquarium) , fluence , laser , spectral line , intensity (physics) , crystallization , wavelength , optics , chemistry , optoelectronics , nanotechnology , physics , oceanography , chromatography , astronomy , geology , organic chemistry , composite material
The correlation between optical emission spectra (OES) and growth behavior of (PbBa)(Zn 1/3 Nb 2/3 )(ZrTi)O 3 , PBZNZT, thin films were investigated. OES peak intensity ( I p ) first increases with laser fluence ( J l ) and laser repetition rate ( r l ) and then reaches a plateau, while the excitation temperature ( T p ) of Pb species is insensitive. Conversely, an increase in oxygen pressure ( $P_{{\rm O}_{\rm 2} }$ ) decreases I p and T p peaks corresponding to Pb(I) species. PBZNZT films with good crystallinity and ferroelectric properties ( P r = 23.67–25.95 µC · cm −2 and E c = 399.0–422.6 kV · cm −1 ) were prepared by using J l ≈ 1.0 J · cm −2 , r l ≈ 10 Hz, $P_{{\rm O}_{\rm 2} }$ ≈ 0.45–0.55 mbar, substrate temperature≈400 °C, and a Ba(Mg 1/3 Ta 2/3 )O 3 buffer layer.