Characteristics of Optical Emission Spectra Induced by Laser Beams and Crystallization of PBZNZT Thin Films

The correlation between optical emission spectra (OES) and growth behavior of (PbBa)(Zn 1/3 Nb 2/3 )(ZrTi)O 3 , PBZNZT, thin films were investigated. OES peak intensity ( I p ) first increases with laser fluence ( J l ) and laser repetition rate ( r l ) and then reaches a plateau, while the excitation temperature ( T p ) of Pb species is insensitive. Conversely, an increase in oxygen pressure ( $P_{{\rm O}_{\rm 2} }$ ) decreases I p and T p peaks corresponding to Pb(I) species. PBZNZT films with good crystallinity and ferroelectric properties ( P r  = 23.67–25.95 µC · cm −2 and E c  = 399.0–422.6 kV · cm −1 ) were prepared by using J l  ≈ 1.0 J · cm −2 , r l  ≈ 10 Hz, $P_{{\rm O}_{\rm 2} }$  ≈ 0.45–0.55 mbar, substrate temperature≈400 °C, and a Ba(Mg 1/3 Ta 2/3 )O 3 buffer layer.