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Study of Nanoparticles Formation in a Pulsed Magnetron Discharge in Acetylene
Author(s) -
De Vriendt Valérie,
Maseri Fabrizio,
t Aurélien,
Lucas Stéphane
Publication year - 2009
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200930105
Subject(s) - acetylene , materials science , nanoparticle , agglomerate , cavity magnetron , plasma , plasma polymerization , torr , chemical engineering , morphology (biology) , pulsed dc , coating , silicon , analytical chemistry (journal) , sputter deposition , nanotechnology , thin film , optoelectronics , polymerization , composite material , sputtering , chemistry , organic chemistry , polymer , physics , genetics , quantum mechanics , biology , engineering , thermodynamics
The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 −1 Torr, the influence of t OFF parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t OFF and short t ON for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called ‘flowers’ of micrometric size. To the best of our knowledge, it's the first time that such ‘flowers’ structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and ‘flowers’ are probably formed in gas phase. A growth mechanism in several steps is proposed.