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Mass and Energy Spectrometry of Atmospheric Pressure Plasmas
Author(s) -
Rees J. Alan,
Seymour David L.,
Greenwood ClaireLouise,
Gonzalvo Yolanda Aranda,
Lundie David T.
Publication year - 2010
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200900122
Subject(s) - atmospheric pressure , plasma , atmospheric pressure plasma , mass spectrometry , plasma processing , energy (signal processing) , materials science , computational physics , atomic physics , environmental science , physics , meteorology , nuclear physics , quantum mechanics
Electrical plasmas operating at atmospheric pressure are in widespread use for materials processing and in related areas such as the characterisation of surfaces. The plasma sources are of many types. Improvement of their design and optimisation of their operation require high quality diagnostic data. It is very helpful, for example, to have available information on the nature and energies of the active species produced in a source and impacting on a surface. The extension of diagnostic techniques first developed for work with low pressure plasmas to a wide variety of atmospheric plasmas is discussed, together with examples of the data obtainable.