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Plasma Polymer Surfaces Compatible with a CMOS Process for Direct Covalent Enzyme Immobilization
Author(s) -
Yin Yongbai,
Nosworthy Neil J.,
Gong Bill,
Bax Dan,
Kondyurin Alexy,
McKenzie David R.,
Bilek Marcela M. M.
Publication year - 2009
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200800108
Subject(s) - polymerization , covalent bond , monolayer , materials science , polymer , plasma polymerization , chemical engineering , plasma etching , annealing (glass) , nanotechnology , chemistry , etching (microfabrication) , polymer chemistry , organic chemistry , layer (electronics) , composite material , engineering
Plasma polymerized surfaces, prepared using a CMOS compatible plasma enhanced chemical vapor polymerization technique, are found to covalently immobilize enzymes without the need for intermediate chemical linker groups. The polymerized surfaces are smooth, strongly adherent to substrates, and have a long shelf life for storage. After incubation with enzymes, a densely packed monolayer is attached. We report the effects of both oxygen etching and annealing post‐processing showing that they can be implemented so as not to affect the enzyme binding performance. The fully compatible polymerization method with CMOS device manufacture processes is a potential candidate for integration into nano‐CMOS biochemical sensors for direct immobilization of enzymes.