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Plasma‐Aided Nanofabrication
Author(s) -
Ohl Andreas
Publication year - 2008
Publication title -
plasma processes and polymers
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200800088
Subject(s) - citation , computer science , nanolithography , library science , art history , history , medicine , alternative medicine , pathology , fabrication