Premium
Optimised Plasma Absorption Probe for the Electron Density Determination in Reactive Plasmas
Author(s) -
Scharwitz Christian,
Böke Marc,
Winter Jörg
Publication year - 2009
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200800073
Subject(s) - langmuir probe , plasma , absorption (acoustics) , electron density , work (physics) , electron , materials science , dielectric , plasma diagnostics , calibration , atomic physics , plasma parameters , analytical chemistry (journal) , computational physics , chemistry , optoelectronics , physics , thermodynamics , chromatography , quantum mechanics , composite material
The plasma absorption probe (PAP) is a recently developed tool for the efficient determination of electron densities, especially in reactive plasmas. A dielectric cover protects this probe against the influences in reactive plasmas and it withstands conditions where Langmuir probes are easily damageable. The lack of adequate calibration constants and the occurrence of multiple absorption signals were two major drawbacks, which are successfully overcome in this work. Design variations are tested by numerical computation and the model‐based achievements are established in experiment. In this work, a redesigned PAP is presented, which is optimised for the easy determination of electron densities. The developed tool works fast and efficiently, in particular in discharges in reactive gases.