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Modeling High‐Pressure Microplasmas: Comparison of Fluid Modeling and Particle‐in‐Cell Monte Carlo Collision Modeling
Author(s) -
Hong Yong Jun,
Lee Seung Min,
Kim Gyoo Cheon,
Lee Jae Koo
Publication year - 2008
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200800024
Subject(s) - torr , atomic physics , plasma , helium , electrode , monte carlo method , electron , ion , particle (ecology) , flux (metallurgy) , materials science , particle in cell , physics , thermodynamics , nuclear physics , metallurgy , geology , quantum mechanics , statistics , oceanography , mathematics
The results of simulations using a fluid model and a PIC‐MCC model are compared, and the PIC‐MCC is used to explore the kinetics of energetic ions and electrons in microplasmas. The kinetics are studied under helium discharges at 760 Torr and Ne/Xe DBD discharges at 300 Torr with various driving currents and geometries. While EEPFs of microplasmas at high pressure show strong nonequilibrium behavior near the sheath region, EEDFs on the powered and grounded electrodes have qualitatively different features depending on input power. The effective temperature and energy flux of charged particles can be obtained from the slopes in EEPFs and IEPFs. The effects of input power, discharge length, and mixture gas concentration on the IEDFs on each electrode are discussed.