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Study of the High‐Frequency Inductive Coupled Discharge Plasma Interaction with Walls
Author(s) -
Skudra Atis,
Revalde Gita,
Gavare Zanda,
Silinsh Juris,
Zoritalia,
Polyakov Boriss
Publication year - 2007
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200732322
Subject(s) - plasma , materials science , torr , helium , microplasma , oxygen , spectroscopy , atomic physics , analytical chemistry (journal) , nanoscopic scale , chemistry , nanotechnology , physics , environmental chemistry , organic chemistry , quantum mechanics , thermodynamics
The high‐frequency electrodeless light sources (HFELS) are widely used as bright radiators of narrow and intense spectral lines covering the region from VUV to IR. Special HFELS filled with pure helium at pressures from 0.2 to 5 Torr were prepared for diagnostics of interaction between the filling element and the wall material (glass). Pollution of the discharge plasma with the oxygen admixture was studied by spectroscopy. Atomic force microscopy experiments were performed to find modification of the wall surface at the nanoscale level. Release of oxygen by the walls is found to depend strongly on the discharge conditions and significant changes of the surface structure are detected after plasma treatment.