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Electrical Characterization of Capacitively Coupled Radio Frequency Discharges in Hydrogen
Author(s) -
Marques Luís S. A.,
Jolly Jacques,
Alves Luís L.
Publication year - 2007
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200732303
Subject(s) - radio frequency , plasma , hydrogen , torr , ion , materials science , capacitively coupled plasma , electron , atomic physics , voltage , characterization (materials science) , scaling , analytical chemistry (journal) , inductively coupled plasma , chemistry , physics , electrical engineering , nanotechnology , thermodynamics , geometry , organic chemistry , mathematics , quantum mechanics , chromatography , engineering
This work presents modeling and experimental results for the electrical characterization of capacitively coupled radio frequency (rf) discharges in hydrogen. A two‐dimensional, time‐dependent fluid model is used to describe the dynamics of electrons and positive ions H + , H 2 + , and H 3 +at different frequencies (13.56–80 MHz), pressures (0.2–1 Torr), and rf applied voltages (50–800 V). The current–voltage relationship is reported and found in good qualitative agreement with the experiment. The distribution, between electrons and ions, of the electrical power coupled to the plasma is analyzed. An investigation of the scaling laws for several important plasma parameters is also carried out.