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Influence of Cr and Si Addition on Structural and Mechanical Properties of TiAlN Coatings Reactively Sputter Deposited
Author(s) -
Dehlinger AnneSophie,
Lapostolle Frédéric,
Lamy Sophie,
Rapaud Olivier,
Meunier Cathy,
Brien Valérie,
Klein Didier,
Coddet Christian
Publication year - 2007
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200731411
Subject(s) - materials science , sputtering , deposition (geology) , sputter deposition , scratch , metallurgy , composite material , thin film , nanotechnology , paleontology , sediment , biology
The possibilities offered by magnetron sputtering to obtain Si and Cr enriched (Ti x ,Al y )N coatings are presented, correlating coatings properties to the deposition parameters. After a theoretical study of the sputtering conditions, the coatings deposition was achieved using a TiAl (50‐50 at%) target, with Cr and Si inserts distributed onto its erosion track in order to reach the desired composition. Composition and structural evolution were determined by means of GDOES and XRD. Oxidation resistance of the coatings, as a function of structure and composition, was tested at 900 °C. Mechanical tests were performed by means of unidirectional multi‐pass scratch testing under constant load showing interesting performances.