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Characterization of an Atmospheric Pressure Radio‐Frequency Capacitive Plasma Jet
Author(s) -
Laimer Johann,
Haslinger Stefan,
Störi Herbert
Publication year - 2007
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200731212
Subject(s) - argon , atmospheric pressure , helium , atmospheric pressure plasma , materials science , plasma cleaning , plasma , jet (fluid) , electrode , atomic physics , radio frequency , analytical chemistry (journal) , chemistry , physics , thermodynamics , nuclear physics , electrical engineering , meteorology , engineering , chromatography
There is a steadily growing interest in non‐equilibrium atmospheric pressure plasmas for materials processing. One of the plasma sources developed for this purpose is the atmospheric pressure plasma jet (APPJ), which is characterized by an alpha‐mode of a radio‐frequency (RF) discharge between two bare metallic electrodes. We developed an APPJ with planar electrodes and operated the APPJ with helium/argon process gas mixtures ranging from pure helium to pure argon and characterized the discharges. The alpha‐discharge can be sustained in all process gas mixtures investigated. The sustainable electron density in the alpha‐mode increases steadily with increasing argon content.