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Atmospheric Pressure Barrier Discharge Deposition of Silica‐Like Films on Polymeric Substrates
Author(s) -
Starostine Sergei,
Aldea Eugen,
de Vries Hindrik,
Creatore Mariadriana,
van de Sanden M. C. M.
Publication year - 2007
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200731203
Subject(s) - x ray photoelectron spectroscopy , polymer , materials science , deposition (geology) , dielectric barrier discharge , atmospheric pressure plasma , atmospheric pressure , chemical engineering , fourier transform infrared spectroscopy , plasma , analytical chemistry (journal) , composite material , chemistry , organic chemistry , dielectric , optoelectronics , paleontology , oceanography , physics , quantum mechanics , sediment , engineering , geology , biology
Silica‐like coatings were deposited on polymer foils in APG discharge in a roll‐to‐roll configuration. The dependence of film structure and chemical composition on the conditions during deposition process was studied by means of SEM, ATR‐FTIR, and XPS analysis. The influence of oxidant concentration on the deposited film properties is analyzed and discussed. It was observed that pulsing of the APG discharge suppresses dust formation in atmospheric plasma and, therefore, provides uniform coatings.