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Elaboration of Transparent Undoped ZnO and Al‐Doped ZnO Thin Films by Spray Pyrolysis and their Properties
Author(s) -
Rahmane Saâd,
Aïda Mohamed Salah,
Chala Abdelouahad,
Temam Hachemi Ben,
Djouadi Abdou
Publication year - 2007
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.200730908
Subject(s) - materials science , zinc , doping , band gap , thin film , pyrolysis , spray pyrolysis , electrical resistivity and conductivity , aluminium , chemical engineering , conductivity , chloride , absorption (acoustics) , oxide , analytical chemistry (journal) , optoelectronics , composite material , nanotechnology , metallurgy , chemistry , organic chemistry , electrical engineering , engineering
This work describes the preparation of zinc oxide thin films using a simple and inexpensive spray pyrolysis technique of zinc chloride (ZnCl 2 ) and aluminum chloride (AlCl 3 ) onto glass substrates. Structural, optical, and electrical properties are determined in the temperature range of 350–600 °C. All the films prepared were uniform and well adherent to the substrates, XRD studies showed that the films grow with (002) preferred orientation. Estimated band gap energy from optical absorption data was 3.2–3.4 eV. The measured electrical conductivity at room temperature was found in the order of 10 −1 (Ω · cm) −1 for ZnO and it is higher by two orders of magnitude for ZnO:Al.