Hydrogen Permeation through Diamond‐Like Carbon Thin Films Coated on PET Sheet | Zendy

Hatta Akimitsu | Zendy; Kaneko Shikou | Zendy; Hassan Md. Kamrul | Zendy

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Hydrogen Permeation through Diamond‐Like Carbon Thin Films Coated on PET Sheet

Author(s) -

Hatta Akimitsu,

Kaneko Shikou,

Hassan Md. Kamrul

Publication year - 2007

Publication title -

plasma processes and polymers

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.644

H-Index - 74

eISSN - 1612-8869

pISSN - 1612-8850

DOI - 10.1002/ppap.200730709

Subject(s) - permeation , materials science , polyethylene terephthalate , diamond like carbon , hydrogen , chemical vapor deposition , chamber pressure , carbon fibers , coating , diamond , composite material , analytical chemistry (journal) , carbon film , thin film , chemical engineering , nanotechnology , metallurgy , chemistry , membrane , composite number , chromatography , organic chemistry , biochemistry , engineering

Hydrogen (H 2 ) permeation through diamond‐like carbon (DLC) thin films has been investigated by using dynamic observation of H 2 leakage through the DLC films into a high vacuum chamber equipped with a quadropole mass spectrometer (QMS). DLC films were deposited on polyethylene terephthalate (PET) sheets using radio frequency (RF) plasma chemical vapor deposition (CVD) method from C 2 H 2 source gas. The specimen was set on the flange of an ultra‐high vacuum (UHV) chamber and H 2 gas was permeated through the sheet. The permeation of H 2 through the 0.3 mm thick PET sheet started within a few minutes and became saturated in the permeation rate within a few hours after the pressure difference was applied. With the 100‐nm thick DLC coating, the response of H 2 permeation was delayed and the permeation rate was decreased.

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